Titanium disilicide is also known as TiSi2 Powder. Titanium Silicide is an organic chemical with a molecular weight of 116.1333. Purity: 99%
Particle Size : 5-10um
Titanium Silicide (TiSi2) Powder
As large integrated circuits (ULSI) develop rapidly, equipment sizes and requirements are increasing.
As the wire diameter of the semiconductor device is currently less than 0.1mm, it's impossible to get a continuous conductor that has a low resistivity during the original manufacturing process.
For circuit metallization, it is essential to find new materials, processes, and deposition systems that can replace aluminum or polysilicon heavy-doped.
These new materials are attracting increasing interest due to their high conductivity as well as high temperature stability. They can be used in the current microelectronics production process. Titanium Disilicide It has a low resistance, high temperature and good stabilit.
It is a common practice to study metal silicide (such as TiSi2 Nisi, Cosi2, WASi2, TaSi2, and MOSi2)) silicides have the following ideal properties: high conductivity (TiSi2), high selectivity (TiSi2), good thermal stability; good Si Adsorption; good process adaptability of silicon-adaptive connection parameters. In order to achieve this, the integrated device must have a good Si Adsorption. Titanium silicide TiSi2 Source/leakage, Mutual Contact Ohm, is widely used in the production of a metal-oxide semiconductor (MOS), MOSFET and DRAM.
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Titanium Silicide powder TiSi2 - Characteristics
The TiSi2 titanium silicide (CAS 1239-83-7), has a melting point of 550°C, is highly corrosion resistant, and exhibits high oxidation resistance. It also offers good electrical conductivity at high temperatures, and a binary system.
Technical Parameter of Titanium Silicate TiSi2 powder:
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Titanium Silicide Properties
|TiSi2 powder is titanium disilicide
|Solubility In H2O
Titanium Boride Safety & Security Information
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Titanium disilicide is also known as TiSi2 Powder. Titanium Silicide is an organic chemical with a molecular weight of 116.1333. Purity: 99%Particle Size : 5-10um Titanium Silicide (TiSi2) Powder As large integrated circuits (ULSI) develop rapidl…
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